Microelectronic Engineering: an international journal of semiconductor manufacturing technology
Código CCN: 087843-X
| ISSN (Online): 0167-9317 |
| Country: Não informado |
| Publisher: Elsevier Science Publishers |
| Imprenta:
Amsterdam:
Elsevier Science Publishers,
1983
|
| Área de numeração: Vol. 1, No. 1 (Sept. 1983)- |